Method for bonding slider row bars for photolithography process
US7549214B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 1, 2006 |
| Grant date | Jun 23, 2009 |
| Priority date | — |
| Expiry date | Apr 24, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53191
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Certain example embodiments relate to a method for bonding slider row bars for a photolithography process. A holding device having a sticky surface is formed. A plurality of slider row bars is provided, with each having a first surface for forming an air bearing surface and a second surface opposite the first surface. The slider row bars are secured to the holding device with their first surfaces facing the sticky surface so that the first surfaces of the slider row bars are aligned each other. The slider row bars are bonded together by an encapsulating glue. A carrier is provided, and the carrier is bonded to the second surfaces of the slider row bars. The holding device is removed. The example embodiments also can be used to manufacture sliders.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.