Patent · US Expired

Remotely testable temperature sensor

US7549791B2 · kind B2 · utility

6Cited by
13References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 10, 2004
Grant dateJun 23, 2009
Priority date
Expiry dateJun 25, 2025

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01L19/0092
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The invention relates to a remotely interrogable SAW (surface acoustic wave) temperature sensor comprising. At least two resonators (T1, saw, T2, saw) have transducers having interdigitated electrodes connected to control buses of design such that they have different characteristic operating frequencies. A first resonator has a first surface acoustic wave propagation direction, parallel to one of the axes of the substrate, and a second resonator has a surface acoustic wave propagation direction making a nonzero angle (β) with the propagation direction of the first resonator. The control buses of the second transducer are inclined at a nonzero angle (γ) to the normal to the interdigitated electrodes of the second transducer so as to compensate for the power flow divergence of the acoustic waves along the second transducer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.