Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7550794B2 · kind B2 · utility
47Cited by
343References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2002 |
| Grant date | Jun 23, 2009 |
| Priority date | — |
| Expiry date | Sep 20, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B3/0035
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.