Patent · US Active

Actuator for micro-electromechanical system fabry-perot filter

US7551287B2 · kind B2 · utility

6Cited by

23References

16Claims

0Family size

Assignee

GE Homeland Protection, Inc. · US

Inventors

Anis Zribi · Colorado Springs, US
Glenn Scott Claydon · Wynantskill, US
David Cecil Hays · Niskayuna, US
Stacey Joy Kennerly · Niskayuna, US
Long Que · Rexford, US
Shankar Chandrasekaran · Viralimalai, IN
Shivappa Goravar · Bengaluru, IN
Ayan Banerjec · Savanuru, IN

Key dates

Filing date	Aug 10, 2006
Grant date	Jun 23, 2009
Priority date	—
Expiry date	Nov 25, 2026

Classification

Technology area (CPC A)Human Necessities
CPC primaryA45D4/18
WIPO fieldOther consumer goods
WIPO sectorOther fields

Abstract

According to one embodiment, a micro-electrical mechanical system apparatus includes a bi-stable actuator and at least one movable Fabry-Perot filter cavity mirror coupled to the bi-stable actuator. The bi-stable actuator may be associated with a first latched position and a second latched position and may comprise, for example, a thermal device, an electrostatic device (e.g., a parallel plate or comb drive), or a magnetic device. According to some embodiments, a relationship between a voltage applied to an actuator of a Fabry-Perot filter and an amount of displacement associated with a movable mirror is substantially linear.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.