Magnetic head with air bearing surface protection film and manufacturing method thereof
US7551398B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 5, 2005 |
| Grant date | Jun 23, 2009 |
| Priority date | — |
| Expiry date | Oct 15, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/3106
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
To promote reduction in thickness of an air bearing surface protective film of a magnetic head, a magnetic head having an air bearing surface protective film consisting only of a thin carbon film while excluding formation of a dead layer by ion incidence as less as possible to the read/write device, and a manufacturing method therefore, are provided. In an embodiment, an air bearing surface protective film of a magnetic head comprises a thin carbon film, in which the mass density a lowermost layer of the air bearing surface protective film on the side of a magnetic device is made lower compared with a thin carbon film constituting other adjacent layers. Further, the manufacturing method comprises deposition under the control of time for the incident angle of ion flow to a substrate to be processed and deposition under the control of time for the ion flow energy to a substrate to be processed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.