Detection of resonator motion using piezoresistive signal downmixing

US7552645B2 · kind B2 · utility

Assignee

• CALIFORNIA INSTITUTE OF TECHNOLOGY · US

Inventors

• Igor Bargatin · Wynnebrook Manor, US
• Edward Myers · Burbank, US
• Mo Li · Irvine, US
• Jessica L. Arlett · South Pasadena, US
• Benjamin Gudlewski · Pasadena, US
• Michael L. Roukes · Pasadena, US
• Darron K. Young · South Pasadena, US
• Hong X. Tang · Pasadena, US

Key dates

• Filing date: Feb 24, 2005
• Grant date: Jun 30, 2009
• Expiry date: Feb 24, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q20/04
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A system containing a micro-mechanical or nano-mechanical device and a method of operating the same is provided. The device includes a resonator and a piezoresistive element connected to the resonator. The method includes AC biasing the piezoresistive element at a first frequency, driving the resonator at a second frequency different from the first frequency, and detecting a mechanical response of the resonator at one or both of a difference frequency and a sum frequency of the first and second frequencies.