Patent · US Active

Backfilled, self-assembled monolayers and methods of making same

US7553547B2 · kind B2 · utility

8Cited by
4References
32Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 21, 2005
Grant dateJun 30, 2009
Priority date
Expiry dateApr 26, 2027

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/31663
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

Backfilled, self-assembled monolayers and methods of making the same are disclosed. The self-assembled monolayer comprises at least one functional organosilane species and a substantially random dispersion of at least one backfilling organosilane species among the functional organosilane species, wherein the functional and backfilling organosilane species have been sequentially deposited on a substrate. The method comprises depositing sequentially a first organosilane species followed by a backfilling organosilane species, and employing a relaxation agent before or during deposition of the backfilling organosilane species, wherein the first and backfilling organosilane species are substantially randomly dispersed on a substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.