Daisy chained topology

US7555409B1 · kind B1 · utility

Assignee

• KLA-TENCOR CORPORATION · US

Inventors

• Krishnamurthy Bhaskar · San Jose, US
• Mark J. Roulo · Milpitas, US
• John S. Taylor · San Jose, US
• Lawrence R. Miller · New York, US
• Paul T. Russell · Scotts Valley, US
• Jason Z. Lin · Saratoga, US
• Eliezer Rosengaus · Palo Alto, US
• Richard Wallingford · San Jose, US
• Kishore Bubna · Fremont, US

Key dates

• Filing date: Oct 18, 2004
• Grant date: Jun 30, 2009
• Expiry date: Jun 6, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/95684
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An inspection system. The inspection system has a sensor for generating data. A first network is coupled to the sensor and communicates the data. An array of nodes is coupled to the first network, and processes the data to produce reports. Each node has an interface coupled to the first network, and formats the data according to protocol. A bus is coupled to the interface A computer is coupled to the bus, and process the data according to an algorithm, to produce the report. The array of nodes is coupled to the first network in a daisy chain topology, and each node within a column of nodes receives common data with other nodes within the column. A second network is coupled to the nodes the second network, and receives the anomaly reports from the nodes and sends information to the nodes to coordinate processing of the data.