Thermoelastic self-actuation in piezoresistive resonators
US7555938B2 · kind B2 · utility
17Cited by
2References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2007 |
| Grant date | Jul 7, 2009 |
| Priority date | — |
| Expiry date | Sep 19, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.