Liquid-jet head, method for manufacturing the same, and liquid-jet apparatus
US7559631B2 · kind B2 · utility
18Cited by
15References
52Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2004 |
| Grant date | Jul 14, 2009 |
| Priority date | — |
| Expiry date | Dec 27, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14491
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A liquid-jet head and a manufacturing method thereof are provided. The liquid-jet head includes a channel substrate which has pressure generation chambers formed therein and communicating nozzle orifices for discharging liquid droplets, and piezoelectric elements. The piezoelectric element includes a lower electrode, a piezoelectric layer and an upper electrode, and disposed on one surface of the channel substrate via a vibration plate, wherein at least pattern regions of the respective layers which constitute the piezoelectric element are covered with an insulating film formed of an inorganic insulating material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.