Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
US7560136B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2003 |
| Grant date | Jul 14, 2009 |
| Priority date | — |
| Expiry date | Jan 23, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/751
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.