Method for forming nanoscale features

US7560658B2 · kind B2 · utility

Assignee

• THE REGENTS OF THE UNIVERSITY OF MICHIGAN · US

Inventors

• Alan Hunt · Plymouth, US
• Gerald Mourou · Ann Arbor, US
• Ajit P. Joglekar · Ann Arbor, US
• Edgar Meyhofer · Ann Arbor, US
• John A. Nees · Ann Arbor, US
• Greg Spooner · Kensington, US

Key dates

• Filing date: Jun 27, 2005
• Grant date: Jul 14, 2009
• Expiry date: Apr 12, 2027

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B23K26/361
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

Here is presented a versatile technique for machining of nanometer-scale features using tightly-focused ultrashort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of materials. The features may be extremely small (<20 nm) and are highly reproducible.