Sensor and system for sensing an electron beam
US7560714B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2006 |
| Grant date | Jul 14, 2009 |
| Priority date | — |
| Expiry date | Sep 18, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24495
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The present invention refers to a sensor (10) for sensing an intensity of an electron beam generated by an electron beam generator along a path, the electron beam being exited from the generator through an exit window (24). The invention is characterized in that the sensor (10) comprises a conductor (26) located within the path and exposed to the exit window (24), and an insulating housing (28) for shielding the conductor (26), said housing (28) being engaged with the exit window (24) forming a chamber (30) with said exit window (24), and that the conductor (26) is positioned within said chamber (30). The invention also refers to a system for sensing an intensity of an electron beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.