MEMS fiber optic microphone
US7561277B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 2007 |
| Grant date | Jul 14, 2009 |
| Priority date | — |
| Expiry date | Feb 4, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01H9/004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The theory, design, fabrication, and characterization of MEMS (micro electrical mechanical system) Fabry-Perot diaphragm-fiber optic microphone are described in the present invention. By using MEMS technology in processing and packaging, a square 1.9 mm×1.9 mm, 2 μ thick SiO2 diaphragm with a 350 μ square embossed center of silicon is mechanically clamped to the ferrule of a single mode fiber to keep its closeness (5 μ) and perpendicular orientation with respect to the diaphragm. Static measurement of optical output power versus the pressure on membrane reveals more than one period of Fabry-Perot interference, thereby generating a Fabry-Perot diaphragm-fiber interferometer device accurately reproducing audible acoustic wave.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.