Flexural resonator sensing device and method
US7562557B2 · kind B2 · utility
35Cited by
17References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2005 |
| Grant date | Jul 21, 2009 |
| Priority date | — |
| Expiry date | Oct 29, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flexural resonator includes a piezoelectric material. At least a portion of an electrode having a first surface and a second surface is embedded in the piezoelectric material such that the piezoelectric material is disposed over and in electronic association with the first and second surfaces of the electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.