Wafer clamp having changeable supporting part
US7562922B2 · kind B2 · utility
0Cited by
7References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 2007 |
| Grant date | Jul 21, 2009 |
| Priority date | — |
| Expiry date | May 14, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S294/902
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A wafer clamp according to the present invention always firmly clamps a wafer. A supporting arm of the wafer clamp will be replaced with a different one according to the wafer size. Moreover, with a larger area of the supporting arm, a wear resistance and a smoothness of the wafer is improved. Besides, the wafer clamp stops the wafer from slipping. Hence, the present invention has a simple structure, a good practicality and a wide application.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.