Electrode assembly for the removal of surface oxides by electron attachment
US7563380B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2004 |
| Grant date | Jul 21, 2009 |
| Priority date | — |
| Expiry date | Feb 11, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.