Method of making a textured surface
US7563722B2 · kind B2 · utility
13Cited by
4References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2005 |
| Grant date | Jul 21, 2009 |
| Priority date | — |
| Expiry date | Feb 21, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/945
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of micro- and nanotexturing of various solid surfaces in plasma where carbon nanotubes are used as an etch mask. The method allows obtaining textures with feature sizes that can be controlled with the nanotube dimensions and the density of coating the treated surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.