Alumina member and manufacturing method thereof
US7564008B2 · kind B2 · utility
8Cited by
6References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2005 |
| Grant date | Jul 21, 2009 |
| Priority date | — |
| Expiry date | Jul 1, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49087
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An electrostatic chuck includes a base of a sintered body containing alumina, an electrode as a power-supplied member embedded in the base and supplied with electric power, a bonding member embedded in the base and bonded to the electrode, in which a difference in coefficient of thermal expansion from the sintered body is 2×10−6/K or less, and a melting point is higher than baking temperature of the sintered body, and a terminal bonded to the electrode through the bonding member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.