Method of inspecting thin film magnetic head element using scanning electron microscope, and inspecting holding jig
US7564044B2 · kind B2 · utility
0Cited by
10References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2006 |
| Grant date | Jul 21, 2009 |
| Priority date | — |
| Expiry date | Oct 17, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/455
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of efficiently inspecting a thin film magnetic head is provided. The method including holding a slider bar having a plurality of the thin film magnetic head elements in a row by an inspecting holding jig made of a nonmagnetic material; loading the slider bar held by the inspecting holding jig to a sampling placing part of a scanning electron microscope; and sequentially executing shape inspection of the plurality of thin film magnetic head elements on the slider bar by the scanning electron microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.