Patent · US Active

Micromechanical device having integrated heating

US7564338B2 · kind B2 · utility

2Cited by

4References

12Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Richard Muehlheim · Lörrach, DE
Frank Wehrmann · Bad Oeynhausen, DE
Polichronis Lepidis · Reutlingen, DE

Key dates

Filing date	Jul 28, 2005
Grant date	Jul 21, 2009
Priority date	—
Expiry date	Aug 13, 2026

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2207/115
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical device having a micromechanical component and a heating element and a method for controlling and/or regulating the heating element. In this context, the heating element is used to bring the micromechanical component, which preferably has electrical components, and/or a passivator surrounding the micromechanical component to a specifiable temperature.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.