MEMS-based, phase-shifting interferometer

US7564559B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Hyuck Choo · San Marino, US
• Richard S. Muller · Richmond, US
• David Garmire · Honolulu, US
• James Demmel · Berkeley, US
• Rishi Kant · Boulder, US

Key dates

• Filing date: Jun 2, 2006
• Grant date: Jul 21, 2009
• Expiry date: May 20, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B2290/70
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Provided herein are optical devices fabricated to include a reflective surface, actuators and stress-relieving structures. Systems containing such devices, and methods of manufacturing such devices, are also provided.