Patent · US Active

Photonic MEMS and structures

US7564612B2 · kind B2 · utility

97Cited by
327References
25Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 19, 2005
Grant dateJul 21, 2009
Priority date
Expiry dateJun 20, 2026

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/001
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position with a first distance between the first and second optical layers and a second position with a second distance between the first and second optical layers. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.