Patent · US Expired

Methods for implement microscopy and microscopic measurement as well as microscope and apparatus for implementing them

US7564622B2 · kind B2 · utility

8Cited by
8References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 6, 2004
Grant dateJul 21, 2009
Priority date
Expiry dateMay 4, 2025

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B21/14
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A microscope is provided that enables a phase object or surface pits and projections to be observed at a relatively low image-formation magnification of 4 or lower over a wide viewing range yet in a relatively narrow spatial frequency distribution range. The microscope comprises a light source, an illumination optical system, a partial aperture located at the pupil position of the illumination optical system, an image-formation optical system, and an eyepiece optical system or an image pickup optical system, wherein the diameter of the image of a partial aperture at the pupil position of the image-formation optical system is set smaller than the pupil diameter of the image-formation optical system, and at the pupil position of the image-formation optical system there is located an element for introducing in the pupil position of the image-formation optical system a wavefront varying in size with the pupil diameter.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.