Sealing device for a gas inlet to an oven or the like
US7566221B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2007 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | Feb 13, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S277/903
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A pipe for feeding a gas into an oven, a furnaces, or the like (such as a CVI/CVD oven), and in particular into a reaction chamber structure inside the oven, is provided with a gastight tubular sealing device extending radially outward of the pipe and defining a path that is practically gastight, through which there extends the feed pipe. The tubular sealing device is preferably at least partially flexible in the transverse direction and/or the axial direction so as to accommodate positioning defects between a location situated in the reaction chamber and a location where the gas feed pipe penetrates the oven (which defects may be due, for example, to asymmetrical thermal expansion/contraction).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.