Patent · US Expired

Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles

US7566478B2 · kind B2 · utility

50Cited by
231References
29Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 13, 2003
Grant dateJul 28, 2009
Priority date
Expiry dateSep 25, 2023

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/843
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

Methods of Making Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.