Patent · US Active

Method and system for treating an interior surface of a workpiece using a charged particle beam

US7566888B2 · kind B2 · utility

5Cited by
11References
23Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 23, 2007
Grant dateJul 28, 2009
Priority date
Expiry dateMar 21, 2028

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/3174
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.