Method and system for treating an interior surface of a workpiece using a charged particle beam
US7566888B2 · kind B2 · utility
5Cited by
11References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 23, 2007 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | Mar 21, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3174
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.