Semiconductor devices including nanotubes
US7566945B2 · kind B2 · utility
15Cited by
1References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 2006 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | Jul 28, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/94
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Nano semiconductor switch devices are provided that include a semiconductor substrate and a conductive layer on the semiconductor substrate. A first insulating layer is provided on the conductive layer and the semiconductor substrate. The first insulating layer defines a contact hole that exposes at least a portion of the conductive layer. Carbon nano tubes are provided on the exposed portion of the conductive layer in the contact hole. The carbon nano tubes are in a vertical direction with respect to the semiconductor substrate. Related methods of fabrication are also provided herein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.