System and method for micro-electromechanical operation of an interferometric modulator
US7567373B2 · kind B2 · utility
48Cited by
362References
26Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 26, 2005 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | Jul 26, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.