Method and arrangement for suppressing stray light
US7567726B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 4, 2005 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | Oct 20, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/16
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method images an object (4) by means of a wide field optic onto a position resolving detector (6) for optical radiation with suppression of stray light. In this method, the object (4) is illuminated in at least one object plane (3) with at least two illumination patterns (26, 27) and corresponding images are detected for each of the illumination patterns (26, 27). The illumination patterns (26, 27) each have bright regions (26; 33; 37) and dark regions (27) in the object plane (3). When there is a superposition of the illumination patterns (26, 27) in the optic plane (3), the object (4) is completely covered. A dark image of the object is determined from the detected images. A bright image of the object (4) is generated and the dark image is subtracted from the bright image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.