Position control for scanning probe spectroscopy
US7569077B2 · kind B2 · utility
8Cited by
14References
29Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 15, 2007 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Jan 22, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of position control for scanning probe spectroscopy of a specimen. Probe positional error is determined by comparing images generated from a sequence of scans to identify differences between positions of at least a portion of a reference characteristic of the specimen in the images. A probe is moved to a target location for spectroscopic analysis, as a function of the determined probe positional error.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.