Patent · US Expired

Electrochemical etching

US7569490B2 · kind B2 · utility

73Cited by
18References
32Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 15, 2005
Grant dateAug 4, 2009
Priority date
Expiry dateJul 7, 2025

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC25F3/14
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

Methods to etch a workpiece are described. In one embodiment, a workpiece is disposed within an etchant solution having a composition comprising a dilute acid and a non-ionic surfactant. An electric field is generated within the etchant solution to cause an anisotropic etch pattern to form on a surface of the workpiece.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.