Apparatus and method for calibrating a reflecting mirror
US7569805B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 2006 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Apr 19, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0808
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus for measuring the position of the mirror of a diffractive light modulator and performing positional compensation, and a method of controlling the apparatus. A position measurement unit measures the position of a mirror of the diffractive light modulator. A control unit calculates the value of displacement from a reference position by evaluating a position value calculated by the position measurement unit, calculates a compensation value and outputs a compensation control signal. A compensation and actuation unit performs compensation on a drive voltage in response to the compensation control signal, and actuates the mirror of the diffractive light modulator using the compensated drive voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.