Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors
US7570066B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 1, 2007 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Nov 3, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/2451
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus includes a first capacitive sensor connected to a first supply voltage, a second capacitive sensor connected to a second supply voltage, a sensing circuit for producing a sense voltage in response to current flowing in the first and second capacitive sensors, a first mixer for combining the sense voltage with a first reference voltage to produce a first signal representative of in-plane displacement between electrodes of the first and second capacitive sensors, and a second mixer for combining the sense voltage with a second reference voltage to produce a second signal representative of out-of-plane displacement between the electrodes of the first and second capacitive sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.