Monolithic microwave integrated circuit (MMIC) waveguide resonators having a tunable ferroelectric layer
US7570137B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2005 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Aug 4, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P7/065
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A ferroelectric loaded waveguide resonator capable of operation at microwave, millimeter-wave and higher frequencies and suitable for integration into a three-dimensional monolithic microwave integrated circuit (3D MMIC) is disclosed. The resonator includes a resonator cavity, which, in one form of the invention, is formed by two parallel metal layers and a metallized wall structure extending between the metal layers. The cavity is filled with dielectric material and includes a layer of ferroelectric material, which is used to control the resonant frequency by varying a voltage bias applied to the ferroelectric layer. The cavity includes a slot in one of the metal layers and a coupling strip formed adjacent to the slot to provide electromagnetic coupling to other components, such as a voltage controlled oscillator (VCO). The invention can also be applied to other multi-metal semiconductor or wafer level packaging technologies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.