Dynamic sampling with efficient model for overlay
US7571420B2 · kind B2 · utility
6Cited by
1References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2007 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Oct 21, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.