Piezoelectric vibration angular velocity sensor
US7571648B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 23, 2007 |
| Grant date | Aug 11, 2009 |
| Priority date | — |
| Expiry date | Jun 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5642
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular velocity sensor includes a protrusion protruding in a Y′-axis direction and extending in an X-axis direction on a main surface of a rotated Y cut quartz plate, and an excitation electrode and a detection electrode formed on the main surface adjacent to this protrusion. This excitation electrode excites thickness-shear vibration in the X-axis direction on the quartz substrate, exiting vibration on the protrusion. Then, the protrusion is bent and displaced due to Coriolis force acting in a direction orthogonal to the vibration of the protrusion corresponding to a rotation around an Y′ axis. This displacement at the protrusion is applied to the quartz substrate as stress. The detection electrode detects change of this stress, thereby angular speed added to the angular velocity sensor is detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.