Photo-patterned carbon electronics
US7572482B2 · kind B2 · utility
13Cited by
7References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2006 |
| Grant date | Aug 11, 2009 |
| Priority date | — |
| Expiry date | Jan 4, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/221
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system is provided for the manufacture of carbon based electrical components including, an ultraviolet light source; a substrate receiving unit whereby a substrate bearing a first layer of carbon based semiconductor is received and disposed beneath the ultraviolet light source; a mask disposed between the ultraviolet light source and the carbon based semiconductor layer; a doping agent precursor source; and environmental chemical controls, configured such that light from the ultraviolet light source irradiates a doping agent precursor and the first carbon layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.