Method for fabricating vertically-offset interdigitated comb actuator device
US7573022B2 · kind B2 · utility
11Cited by
10References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2006 |
| Grant date | Aug 11, 2009 |
| Priority date | — |
| Expiry date | Dec 1, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.