Methods for SEM inspection of fluid containing samples
US7573031B2 · kind B2 · utility
16Cited by
2References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 2007 |
| Grant date | Aug 11, 2009 |
| Priority date | — |
| Expiry date | Jun 19, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2608
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of visualizing a sample in a wet environment including introducing a sample into a specimen enclosure in a wet environment and scanning the sample in the specimen enclosure in a scanning electron microscope, thereby visualizing the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.