Patent · US Active

Micro-electromechanical system Fabry-Perot filter mirrors

US7573578B2 · kind B2 · utility

7Cited by

6References

16Claims

0Family size

Assignee

GE Homeland Protection, Inc. · US

Inventors

Anis Zribi · Colorado Springs, US
Glenn Scott Claydon · Wynantskill, US
David Cecil Hays · Niskayuna, US
Stacey Joy Kennerly · Niskayuna, US
Long Que · Rexford, US
Shankar Chandrasekaran · Viralimalai, IN
Shivappa Goravar · Bengaluru, IN
Ayan Banerjee · Fremont, US

Key dates

Filing date	Aug 10, 2006
Grant date	Aug 11, 2009
Priority date	—
Expiry date	Jan 27, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG02B26/001
WIPO fieldOptics
WIPO sectorInstruments

Abstract

According to one embodiment, a micro-electrical mechanical system apparatus includes first and second mirrors that define a cavity. Moreover, a photonic band-gap structure coats a surface of at least one of the first or second mirrors to improve reflectivity. Another embodiment includes a third mirror, wherein the second and third mirrors form a second cavity. The spaces between the mirrors might comprise, for example, a pair of Fabry-Perot filter cavities for a spectrometer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.