Patent · US Active

Optical element holding apparatus and exposure apparatus

US7573659B2 · kind B2 · utility

0Cited by

1References

4Claims

0Family size

Assignee

Canon Kabushiki Kaisha · JP

Inventors

Ichiro Onuki · Kawasaki, JP
Kenichi Kobayashi · Ichikawa, JP
Kenji Yoshida · Tokyo, JP
Jun Ota

Key dates

Filing date	Oct 26, 2007
Grant date	Aug 11, 2009
Priority date	—
Expiry date	Oct 26, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/7085
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A holding apparatus for holding an optical element includes a measuring part configured to measure a coordinate of the optical element, and a driving part configured to move the optical element based on the coordinate measured by the measuring part, wherein the measuring part includes a first sensor configured to detect a displacement amount of a part of the optical element, and a second sensor configured to detect that a part of the optical element is located at a predetermined position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.