Non-contact condensation detecting method and non-contact condensation detecting apparatus
US7574910B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2008 |
| Grant date | Aug 18, 2009 |
| Priority date | — |
| Expiry date | Feb 28, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/66
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A disclosed detector element includes a substrate including a void, a heating unit including a heat generating electrode bridged across the void, and a temperature sensor including a temperature sensor electrode provided above the void. The heat generating electrode and the temperature sensor electrode are warped, cantilevered, and standing up in space. The temperature sensor measures heat quantity transported from the heating unit. Distribution of an atmosphere surrounding an object surface with respect to the object surface, and the transportation state of the atmosphere are measured by using at least one of temperature, humidity, a direction or velocity of flow, pressure, and composition of gas in the atmosphere. Behavior of the gas adhering and aggregating onto the object surface, and behavior of aggregated liquid undergoing transpiration from the object surface are detected, based on the distribution and the transportation state measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.