Cleaning sheet and process for cleaning substrate treatment device using same
US7575790B2 · kind B2 · utility
10Cited by
2References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 31, 2002 |
| Grant date | Aug 18, 2009 |
| Priority date | — |
| Expiry date | Oct 31, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2848
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A cleaning sheet comprising: a cleaning layer; and a protective film treated with a releasing agent comprising a silicone, the protective film being provided as a separator on at least one side of the cleaning layer, wherein an amount of silicone attached to the cleaning layer when the separator is peeled off from the cleaning layer is 0.005 g/m2 or less as calculated in terms of polydimethylsiloxane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.