Optical element with an opaque chrome coating having an aperture and method of making same
US7575798B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2005 |
| Grant date | Aug 18, 2009 |
| Priority date | — |
| Expiry date | Nov 17, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24917
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A substrate includes an opaque chrome coating on a surface of the substrate dry-etched to form an aperture, wherein chrome in the aperture is below detectable limit. A method of forming an opaque chrome coating on a substrate includes depositing an initial thickness of the opaque chrome coating on the substrate without ion-assist or with undetectable ion-assist and depositing the remainder of the opaque chrome coating with or without ion-assist. In one embodiment the invention is directed to an apertured optical element having a substrate transmissive to light and an opaque chrome coating on the substrate defining an aperture. Three- and four-layer opaque coatings of various materials are disclosed, including three-layer chrome/chrome oxide/chrome coatings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.