Interferometric measuring device for recording geometric data for surfaces
US7576864B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2004 |
| Grant date | Aug 18, 2009 |
| Priority date | — |
| Expiry date | Sep 20, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometric measuring device for recording geometric data for surfaces of at least one object, including a beam supply section including a modulation interferometer fed by a light source including temporarily coherent broadband radiation, a measuring interferometer system that is connected thereto and includes a plurality of probe units for emitting radiation of measuring beams onto the assigned surface locations and recording the radiation reflected by the surface locations, the radiation forming interference with radiation reflected by a related reference element system, and including a downstream receiving and evaluation device for determining geometric data on the basis of the interfering radiation. A reduced expenditure with respect to operation and configuration is achieved in that a uniform platform, which also includes the receiving and evaluation device and an interface configuration to which the various probe units are optionally connectable, is formed from the beam inlet section including the modulation interferometer, and the modulation interferometer and the receiving and evaluation device are configured such that the various probe units are operable from the sa…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.