Patent · US Expired

Arrangement and method for abating effluent from a process

US7578883B1 · kind B1 · utility

5Cited by
19References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 29, 2001
Grant dateAug 25, 2009
Priority date—
Expiry dateFeb 1, 2026

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB01D2258/0216
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

An arrangement and associated method for abating effluent from an etching process is disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.