Microfluidic device and method of manufacturing the same
US7579136B2 · kind B2 · utility
16Cited by
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8Claims
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Key dates
| Filing date | Apr 28, 2006 |
| Grant date | Aug 25, 2009 |
| Priority date | — |
| Expiry date | Feb 16, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Provided is a method of manufacturing a microfluidic device in which coating film patterns made of a coupling agent are formed in microchannels. The method includes: forming the coating film patterns made of the coupling agent on a Si substrate; selectively oxidizing coupling agent-free regions of the Si substrate having thereon the coating film patterns made of the coupling agent using an oxidizing agent with an oxidation potential from 1 to 2 V; and adhering a PDMS (polydimethylsiloxane) microchannel structure to the selectively oxidized Si substrate to form the microchannels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.