Interferometric apparatus for measuring moving object and optical interferometry method for measuring moving object
US7580133B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2006 |
| Grant date | Aug 25, 2009 |
| Priority date | — |
| Expiry date | Nov 28, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/0675
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A moving-object measuring interferometric apparatus comprises: a light beam output section outputting a measuring beam; an interference optical system obtaining interference light by projecting the measuring beam onto an object and by allowing light reflected from the object or transmitted light having passed through the object to interfere with reference light; an image pickup section obtaining image information by receiving the interference light on an image pickup surface; and an image pickup timing control section setting a momentary image pickup period during which the object is regarded as being stationary to be contained in a light reception acceptable period of the image pickup surface and controlling the interference light to enter the image pickup surface only during the momentary image pickup period.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.