Detector of infrared radiation having a bi-material transducer
US7580175B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2007 |
| Grant date | Aug 25, 2009 |
| Priority date | — |
| Expiry date | Oct 5, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/40
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a temperature difference between the plate and the substrate generated by the incident IR radiation, the suspension arm deforms and changes the offset distance for the plate. In one embodiment, the suspension arm has three rod-shaped bimorph transducers that lie within a plane that is parallel to the substrate. The transducers are also parallel to one another, with the transducer that is attached to an anchor of the suspension arm being located between the two transducers that are attached to the plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.